Determining the ultimate resolution of scanning electron microscope unbiased roughness measurements, part 1: Simulating noise

Mack, ChrisChrisMackLorusso, GianGianLorusso2021-10-272021-10-2720191071-1023https://imec-publications.be/handle/20.500.12860/33489Determining the ultimate resolution of scanning electron microscope unbiased roughness measurements, part 1: Simulating noiseJournal articlehttps://doi.org/10.1116/1.5122758