Monolithic and hybrid integrated on chip optical filters for compact multi-and hyperspectral imaging payloads

Delaure, B.B.DelaureBerteloot, BrechtBrechtBertelootTack, KlaasKlaasTack2026-09-092026-09-092026979-8-9023-2060-90277-786Xhttps://imec-publications.be/handle/20.500.12860/60297Wafer‑level interference filters enable highly compact hyperspectral imagers by integrating spectral filtering directly within the image sensor. We present a CMOS‑based system operating from 450–900 nm with monolithically integrated Fabry–Pérot filters. In addition, we present a filter design for the short‑wave infrared (SWIR) range compatible with InGaAs detectors, using broadened full‑width‑at‑half‑maximum (FWHM) responses as a deliberate design choice to support wider‑band spectral sampling. These implementations demonstrate a scalable path toward lightweight, versatile instruments suited for future airborne and spaceborne Earth‑observation missions.engMonolithic and hybrid integrated on chip optical filters for compact multi-and hyperspectral imaging payloadsProceedings paper10.1117/12.3094858WOS:001839058200005