Ge-on-si and Ge-on-SOI thermo-optic phase shifters for the mid-infrared

Malik, Aditya SinghAditya SinghMalikDwivedi, Sarvagya PaavanSarvagya PaavanDwivediVan Landschoot, LiesbetLiesbetVan LandschootMuneeb, MuhammadMuhammadMuneebShimura, YosukeYosukeShimuraLepage, GuyGuyLepageVan Campenhout, JorisJorisVan CampenhoutVanherle, WendyWendyVanherleVan Opstal, TinnekeTinnekeVan OpstalLoo, RogerRogerLooRoelkens, GuntherGuntherRoelkens2021-10-222021-10-222014-111094-4087https://imec-publications.be/handle/20.500.12860/24186Ge-on-si and Ge-on-SOI thermo-optic phase shifters for the mid-infraredJournal articlehttp://dx.doi.org/10.1364/OE.22.028479