Satta, AlessandraAlessandraSattaSimoen, EddyEddySimoenVan Daele, BennyBennyVan DaeleClarysse, TrudoTrudoClarysseNicholas, GarethGarethNicholasVandervorst, WilfriedWilfriedVandervorstAnwand, WolfgangWolfgangAnwandSkorupa, WolfgangWolfgangSkorupaPeaker, TonyTonyPeakerMarchevic, VladimirVladimirMarchevic2021-10-162021-10-162007-05https://imec-publications.be/handle/20.500.12860/12842Junction formation in Ge by ion implantationProceedings paper