Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias

Xie, RongsiRongsiXieFeng, YanYanFengCan, ZhangZhangCanGuofang, ZhangZhangGuofangvan der Veen, MarleenMarleenvan der VeenJohn, RobertsonRobertsonJohn2021-10-192021-10-192011-09https://imec-publications.be/handle/20.500.12860/20164Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon viasMeeting abstracthttp://www.diamond-conference.elsevier.com/resources/downloads/Diamond2011-PosterProgram.pdf