Growth monitoring with submonolayer sensitivity via real-time thermal-conductance measurements

Ferrando Villalba, PabloPabloFerrando VillalbaTakegami, DaisukeDaisukeTakegamiAbad, LlibertatLlibertatAbadRàfols-Ribé, JoanJoanRàfols-RibéLopeandia, AitorAitorLopeandiaGarcia, GemmaGemmaGarciaRodriguez-Viejo, JavierJavierRodriguez-Viejo2021-10-272021-10-2720192331-7019https://imec-publications.be/handle/20.500.12860/32960Growth monitoring with submonolayer sensitivity via real-time thermal-conductance measurementsJournal articlehttps://link.aps.org/doi/10.1103/PhysRevApplied.12.014007