A Backside-Illuminated Charge-Focusing Silicon SPAD With Enhanced Near-Infrared Sensitivity

Van Sieleghem, EdwardEdwardVan SieleghemKarve, GauriGauriKarveDe Munck, KoenKoenDe MunckVinci, AndreaAndreaVinciCavaco, CelsoCelsoCavacoSuess, AndreasAndreasSuessVan Hoof, ChrisChrisVan HoofLee, JiwonJiwonLee2023-05-042023-05-0420220018-9383WOS:000751497000001https://imec-publications.be/handle/20.500.12860/41539A Backside-Illuminated Charge-Focusing Silicon SPAD With Enhanced Near-Infrared SensitivityJournal article10.1109/TED.2022.3143487WOS:000751497000001PHOTON AVALANCHE-DIODE