Additional evidence of EUV blank defects first seen by wafer printing

Jonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelHendrickx, EricEricHendrickxRonse, KurtKurtRonseBret, TristanTristanBretHofmann, ThorstenThorstenHofmannMagana, JohnJohnMaganaAharonson, IsraelIsraelAharonsonMeshulach, DoronDoronMeshulach2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19139Additional evidence of EUV blank defects first seen by wafer printingProceedings paper