Nucleation and growth of copper on Ru-based substrates: II. the effect of the suppressor additive

Nagar, MagiMagiNagarRadisic, AlexAlexRadisicStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19470Nucleation and growth of copper on Ru-based substrates: II. the effect of the suppressor additiveMeeting abstract