Lloret, F.F.LloretSoto, B.B.SotoRouzbahani Bayatani, RozitaRozitaRouzbahani BayataniGutiƩrrez, M.M.GutiƩrrezHaenen, KenKenHaenenAraujo, D.D.Araujo2023-06-302023-03-092023-06-3020230925-9635WOS:000930981800001https://imec-publications.be/handle/20.500.12860/41248High phosphorous incorporation in (100)-oriented MP CVD diamond growthJournal article10.1016/j.diamond.2023.109746WOS:000930981800001SINGLE-CRYSTAL DIAMONDMETHANE CONCENTRATIONTECHNOLOGYGENERATION