Biesemans, SergeSergeBiesemansKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe Meyer2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1093Use of indium and gallium as P-type dopants in Si 0.1 mm MOSFETsJournal article