Importance of determining the polysilicon dopant profile during process development

Debusschere, IngridIngridDebusschereDeferm, LudoLudoDefermVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1185Importance of determining the polysilicon dopant profile during process developmentJournal article