Towards understanding degradation and breakdown of SiO2/high-k stacks

Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveCartier, EduardEduardCartierGovoreanu, BogdanBogdanGovoreanuBlomme, PieterPieterBlommeKaczer, BenBenKaczerPantisano, LuigiLuigiPantisanoKerber, AndreasAndreasKerberGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6467Towards understanding degradation and breakdown of SiO2/high-k stacksProceedings paper