Statistical distribution of defect parameters

Kaczer, BenBenKaczerToledano Luque, MariaMariaToledano LuqueFranco, JacopoJacopoFrancoWeckx, PieterPieterWeckx2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24023Statistical distribution of defect parametersBook chapter