Simoen, EddyEddySimoenVissouvanadin Soubaretty, BertrandBertrandVissouvanadin SoubarettyTaleb, NadjibNadjibTalebBargallo Gonzalez, MireiaMireiaBargallo GonzalezVerheyen, PeterPeterVerheyenLoo, RogerRogerLooClaeys, CorCorClaeysMachkaoutsan, VladimirVladimirMachkaoutsanBauer, MatthiasMatthiasBauerThomas, ShawnShawnThomasLu, J.-P.J.-P.LuWise, RickRickWise2021-10-172021-10-1720080169-4332https://imec-publications.be/handle/20.500.12860/14481Leakage current study of Si1-xCx embedded source/drain junctionsJournal article