The profileration of heterogeneous integration approaches in silicon(nitride) integrated photonics

Baets, RoelRoelBaets2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34672The profileration of heterogeneous integration approaches in silicon(nitride) integrated photonicsProceedings paperhttps://doi.org/10.1117/12.2552113