Comparison between SiNx:H and hydrogen passivation of electromagnetically casted multicrystalline silicon material

Fourmond, E.E.FourmondLemiti, M.M.LemitiLaugier, A.A.LaugierBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmans2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5295Comparison between SiNx:H and hydrogen passivation of electromagnetically casted multicrystalline silicon materialOral presentation