Integrated approach to improving local CD uniformity in EUV patterning

Liang, AndrewAndrewLiangHermans, JanJanHermansTran, TimTimTranViatkina, KatjaKatjaViatkinaLiang, Chen-WeiChen-WeiLiangWard, BrandonBrandonWardChuang, StevenStevenChuangYu, JengyiJengyiYuHarm, GregGregHarmVandereyken, JelleJelleVandereykenRio, DavidDavidRioKubis, MichaelMichaelKubisTan, SamanthaSamanthaTanWise, RichRichWiseDusa, MirceaMirceaDusaReddy, SirishSirishReddySinghal, AkhilAkhilSinghalVan Schravendijk, BartBartVan SchravendijkDixit, GirishGirishDixitShamma, NaderNaderShamma2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28815Integrated approach to improving local CD uniformity in EUV patterningProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2614223