Nanopotentiometry - Local potential measurements in CMOS transistors using atomic force spectroscopy

Trenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2185Nanopotentiometry - Local potential measurements in CMOS transistors using atomic force spectroscopyProceedings paper