Lariviere, StephaneStephaneLariviereBriggs, BasoeneBasoeneBriggsWilson, ChrisChrisWilsonMallik, ArindamArindamMallikDecoster, StefanStefanDecosterWan, DannyDannyWanBekaert, JoostJoostBekaertBlanco, VictorVictorBlancoMao, MingMingMaoPaolillo, SaraSaraPaolilloKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaVersluijs, JankoJankoVersluijsBoemmels, JuergenJuergenBoemmelsTrivkovic, DarkoDarkoTrivkovicTokei, ZsoltZsoltTokeiMcIntyre, GregGregMcIntyreMocuta, DanDanMocuta2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28759N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUVProceedings paper