Baklanov, MikhaïlMikhaïlBaklanovLe, Quoc ToanQuoc ToanLeKesters, ElsElsKestersIacopi, FrancescaFrancescaIacopiVan Aelst, JokeJokeVan AelstStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8526Challenges of clean/strip processing for Cu/LowK technologyProceedings paper