Sputter yields and Ge migration in oxygen-bombarded SiGe

Huyghebaert, CedricCedricHuyghebaertBrijs, BertBertBrijsJanssens, TomTomJanssensVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6416Sputter yields and Ge migration in oxygen-bombarded SiGeOral presentation