Richard, OlivierOlivierRichardBender, HugoHugoBenderHoussa, MichelMichelHoussaZhao, ChaoChaoZhao2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5610Characterisation of ALCVD ZrO2 thin films by TEMProceedings paper