The influence of the initial LWR, CD and EUV-resist composition on LWR reduction by H2 plasma treatment

De Schepper, PeterPeterDe SchepperAltamirano Sanchez, EfrainEfrainAltamirano SanchezHansen, TerjeTerjeHansenBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23719The influence of the initial LWR, CD and EUV-resist composition on LWR reduction by H2 plasma treatmentMeeting abstract