Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors

Buhler, RudolfRudolfBuhlerEneman, GeertGeertEnemanFavia, PaolaPaolaFaviaBender, HugoHugoBenderVincent, BenjaminBenjaminVincentHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooMartino, JoaoJoaoMartinoClaeys, CorCorClaeysSimoen, EddyEddySimoenCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23590Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressorsMeeting abstract