Material aspects and challenges for SOI FinFET integration

Van Dal, MarkMarkVan DalVellianitis, GeorgiosGeorgiosVellianitisDuffy, RayRayDuffyDoornbos, GerbenGerbenDoornbosPawlak, BartekBartekPawlakDuriez, BlandineBlandineDuriezLai, Li-ShyueLi-ShyueLaiHikavyy, AndriyAndriyHikavyyVandeweyer, TomTomVandeweyerDemand, MarcMarcDemandAltamirano Sanchez, EfrainEfrainAltamirano SanchezRooyackers, RitaRitaRooyackersWitters, LiesbethLiesbethWittersCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakKaiser, M.M.KaiserWeemaes, R. G. R.R. G. R.WeemaesLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14620Material aspects and challenges for SOI FinFET integrationProceedings paper