Luysberg, MartinaMartinaLuysbergHueging, N.N.HuegingUrban, K.K.UrbanBuca, D.D.BucaHolländer, B.B.HolländerMantl, S.S.MantlMorschbacher, M.M.MorschbacherFichtner, P.F.P.P.F.P.FichtnerLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9236In-situ TEM on He implantation induced defects in SiGe/SiProceedings paper