Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

Masood, A.A.MasoodPantouvaki, MariannaMariannaPantouvakiGoossens, DannyDannyGoossensLepage, GuyGuyLepageVerheyen, PeterPeterVerheyenVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsilVan Thourhout, DriesDriesVan ThourhoutBogaerts, WimWimBogaerts2021-10-222021-10-222014-072159-3930https://imec-publications.be/handle/20.500.12860/24225Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devicesJournal articlehttp://www.opticsinfobase.org/ome/abstract.cfm?uri=ome-4-7-1383