Kennes, KoenKoenKennesPhommahaxay, AlainAlainPhommahaxayGuerrero, AliceAliceGuerreroBumueller, DennisDennisBumuellerSuhard, SamuelSamuelSuhardBex, PieterPieterBexTussing, SebastianSebastianTussingLiu, XiaoXiaoLiuBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2023-08-102023-06-202023-08-1020210569-5503WOS:000702282700321https://imec-publications.be/handle/20.500.12860/41968Acoustic modulation during laser debonding of collective hybrid bonded diesProceedings paper10.1109/ECTC32696.2021.00334978-0-7381-4523-5WOS:000702282700321