Strain mapping of tensile strained silicon transistors with embedded Si1yCy source and drain by dark-field holography

Hue, FlorentFlorentHueHytch, MartinMartinHytchHoudellier, FlorentFlorentHoudellierBender, HugoHugoBenderClaverie, AlainAlainClaverie2021-10-172021-10-1720090003-6951https://imec-publications.be/handle/20.500.12860/15506Strain mapping of tensile strained silicon transistors with embedded Si1yCy source and drain by dark-field holographyJournal article