The influence of oxidation-induced stress on the generation current and its impact on scaled device performance

Smeys, PeterPeterSmeysGriffin, P. B.P. B.GriffinRek, Z. U.Z. U.RekDe Wolf, IngridIngridDe WolfSaraswat, K. C.K. C.Saraswat2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1501The influence of oxidation-induced stress on the generation current and its impact on scaled device performanceProceedings paper