Lauwers, AnneAnneLauwersWang, QingfengQingfengWangDeweerdt, BrunoBrunoDeweerdtMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/717Ti/Co bilayers in salicide technology: electrical evaluationJournal article