Ogawa, YuichiYuichiOgawaGan, NobukoNobukoGanMasaoka, ToruToruMasaokaYoshimura, MinamiMinamiYoshimuraIino, HideakiHideakiIinoLe, Quoc ToanQuoc ToanLeKesters, ElsElsKestersAkanishi, YuyaYuyaAkanishiHolsteyns, FrankFrankHolsteyns2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31442Study of cobalt etch control by pH and oxidizerMeeting abstracthttps://linxconferences.com/spcc-2018-technical-program/