Hybrid fixed abrasive CMP for 65 nm STI integration, FinFet structures and other advanced applications

Ong, PatrickPatrickOngDevriendt, KatiaKatiaDevriendtRedolfi, AugustoAugustoRedolfi2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14253Hybrid fixed abrasive CMP for 65 nm STI integration, FinFet structures and other advanced applicationsProceedings paper