Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects

Chiodarelli, NicoloNicoloChiodarelliArstila, KaiKaiArstilaRichard, OlivierOlivierRichardHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16860Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnectsMeeting abstract