Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique

Rehman Khan, AaliyaAaliyaRehman KhanStangl, J.J.StanglBauer, G.G.BauerBuca, D.D.BucaHolländer, B.B.HolländerTrinkhaus, H.H.TrinkhausMantl, S.S.MantlLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12772Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction techniqueJournal article