FDTS as dewetting coating for an electrowetting controlled silcion photonic switch

Gunther, SarahSarahGuntherSi, ShuhaoShuhaoSiD'heer, HerbertHerbertD'heerVan Thourhout, DriesDriesVan ThourhoutHoffman, MartinMartinHoffman2021-10-252021-10-252018-121041-1135https://imec-publications.be/handle/20.500.12860/30818FDTS as dewetting coating for an electrowetting controlled silcion photonic switchJournal articlehttps://ieeexplore.ieee.org/document/8485379