Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technology

Yakimets, DmitryDmitryYakimetsGarcia Bardon, MarieMarieGarcia BardonJang, DoyoungDoyoungJangSchuddinck, PieterPieterSchuddinckSherazi, YasserYasserSheraziWeckx, PieterPieterWeckxMiyaguchi, KenichiKenichiMiyaguchiParvais, BertrandBertrandParvaisRaghavan, PraveenPraveenRaghavanSpessot, AlessioAlessioSpessotVerkest, DiederikDiederikVerkestMocuta, AndaAndaMocuta2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29983Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technologyProceedings paperhttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8268429