Towards the 3D thin-film Li-ion battery: A novel solution-based process for the deposition of (multi-) metal oxide coatings on high aspect ratio features

Gielis, SvenSvenGielisPeys, NickNickPeysMoitzheim, SebastienSebastienMoitzheimVereecken, PhilippePhilippeVereeckenHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25316Towards the 3D thin-film Li-ion battery: A novel solution-based process for the deposition of (multi-) metal oxide coatings on high aspect ratio featuresMeeting abstract