The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation

Schaubroeck, DavidDavidSchaubroeckLi, ChangzhengChangzhengLiVerplancke, RikRikVerplanckeCuypers, DieterDieterCuypersCauwe, MaartenMaartenCauweOp de Beeck, MaaikeMaaikeOp de Beeck2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35908The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulationMeeting abstract