Tuning the properties of periodic mesoporous organosilica films for low-k application by Gemini surfactants

Redzheb, MuradMuradRedzhebOkudur, Oguzhan OrkutOguzhan OrkutOkudurBernstorff, SigridSigridBernstorffJuraic, KrunoslavKrunoslavJuraicVan der Voort, PascalPascalVan der VoortArmini, SilviaSilviaArmini2021-10-262021-10-2620181439-4235https://imec-publications.be/handle/20.500.12860/31646Tuning the properties of periodic mesoporous organosilica films for low-k application by Gemini surfactantsJournal articlehttps://onlinelibrary.wiley.com/doi/abs/10.1002/cphc.201800341