Seifert, W.W.SeifertKittler, M.M.KittlerVanhellemont, JanJanVanhellemontSimoen, EddyEddySimoenClaeys, CorCorClaeysKirscht, F. G.F. G.Kirscht2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1471Recombination activity of oxygen precipitation related defects in SiProceedings paper