Hellin Rico, RaquelRaquelHellin RicoDu Bois, BertBertDu BoisWitvrouw, AnnAnnWitvrouwVan Hoof, ChrisChrisVan HoofCelis, Jean-PierreJean-PierreCelis2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12266Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acidJournal article