Effect of VUV and EUV radiation on utra low-k materials damage

Braginsky, O.O.BraginskyKovalev, A.A.KovalevLopaev, D.D.LopaevMankelevich, Y.Y.MankelevichProshina, O.O.ProshinaRakhimova, T.T.RakhimovaRakhimov, A.A.RakhimovVasilieva, A.A.VasilievaZyryanov, S.S.ZyryanovBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22073Effect of VUV and EUV radiation on utra low-k materials damageProceedings paperhttp://journals.cambridge.org/action/di