Bi2Te3 as an active material for MEMS based devices fabricated at room temperature

Sedky, SherifSherifSedkyKamal, AhmedAhmedKamalYomn, MohannadMohannadYomnBakr, HassanHassanBakrGhannam, RamiRamiGhannamLeonov, VladimirVladimirLeonovFiorini, PaoloPaoloFiorini2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16188Bi2Te3 as an active material for MEMS based devices fabricated at room temperatureProceedings paper