Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisations

Heyvaert, IlseIlseHeyvaertVan Hove, MarleenMarleenVan HoveWitvrouw, AnnAnnWitvrouwMaex, KarenKarenMaexSaerens, AnneliesAnneliesSaerensRoussel, PhilippePhilippeRousselBender, HugoHugoBender2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4429Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisationsJournal article