Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenAlvarez, DavidDavidAlvarezFouchier, MarcMarcFouchier2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9822Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devicesOral presentation