Failure analysis and process improvement for through silicon via interconnects

Majeed, BivraghBivraghMajeedVan Cauwenberghe, MarcMarcVan CauwenbergheSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussan2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15789Failure analysis and process improvement for through silicon via interconnectsProceedings paper