Implementation of Ge and III/V transistors on Si substrates for future generation CMOS technologies

Heyns, MarcMarcHeynsCaymax, MattyMattyCaymaxMeuris, MarcMarcMeuris2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12294Implementation of Ge and III/V transistors on Si substrates for future generation CMOS technologiesProceedings paper