De Wolf, PeterPeterDe WolfSnauwaert, JohanJohanSnauwaertHellemans, L.L.HellemansClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstD'Olieslaeger, MarcMarcD'OlieslaegerQuaeyhaegens, D.D.Quaeyhaegens2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/603Lateral and vertical dopant profiling in semiconductors by atomic force microscopy using conducting tipsJournal article